Abstract
The chapter describes the classification of non-lithography based meso-manufacturing. Non-lithography based meso scale parts are manufactured with different processes and from different size of machines ranging from small to large scale. Desktop machine tools and standard machine tools are the current manufacturing equipment for such machining scale, however desktop machines are the most economic and should achieve better accuracies. Various inherent problems and challenges in the development of highly precise desktop machine tools are discussed in the chapter. A design strategy is proposed for the development of a miniaturized machine tool with the aim of a very high precision. In addition, the benefits of the use of micro machines for the manufacturing of meso scale parts are discussed. Finally, challenges for the development of highly precise micro machines are revealed.
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