Abstract
This paper shows the design of the position sensor, consisting on a structure composed by a structural aluminum layer whose purpose is to act as a linear electrostatic micromotor; it has also a polysilicon layer acting as part of the proposed position sensor, which will operate as a floating gate of a MOS transistor (FGMOS). This structure is designed under the rules of the standard 0.5 micron CMOS technology. Through this, a relation between the position of the micromotor and the current through the FGMOS is obtained. The simulations were obtained using PSpice.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.