Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology

Abstract

This paper shows the design of the mechanical structure of a linear electrostatic micromotor, consisting on four springs to which a moving set of electrodes (which will move due to the electrostatic actuation) is attached to, together with one of the plates for a position sensor of the system. This structure is designed in an aluminum layer under the rules of the standard CMOS technology. In addition, the mechanical structure model which is presented, eliminates the friction between it and the substrate. The simulations were obtained using COMSOL.