Abstract
We have optimized two Ti-compound systems for the largest possible shift in reflectance of visible laser light over a film thickness range of 100 nm on the basis of Fresnel's reflection law and experimental measurements. With a model system consisting of a tribological TiN layer on top of a 50 nm TiO2 signal layer on bearing steel the largest possible shift of the reflectance can be obtained. For a second model system of tribological TiAlN layer on top of a 3 µm thick layer of TiN we have also demonstrated that the reflectance changes significantly with decreasing thickness of the TiAlN films. The precise thickness of the thin films was determined with a combination of energy-dispersive x-ray analysis and Monte Carlo simulations. These results show that optical monitoring with the reflectance is a potential technique for determining the residual thickness of thin tribological films prior to complete wear.
Published Version
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