Abstract
ABSTRACT For the surface shape measurement of a semiconductor with a highly reflective index, it is im portant to effectively suppress the harmonic signal s from multi ple reflection s. In application, the phase extraction algorithm should have a maximum value when there is no phase -shift miscalibration. In this presentation, a new 4N - 3 phase extraction algorithm , which has the ability to suppress harmonic signal s and exhibits a fringe contrast maximum value when there is no phase -shift error , was derived. This n ew 4N - 3 algorithm consists of a new polynomial window function and a discrete Fourier transform term and has the ability to compensate for 2 nd -order nonlineari ty in the phase shift. The suppression ability of the new polynomial window function is compared with other conventional window functions. The sampling functions of the new 4N - 3 algorithm have much smaller amplitudes in the vicinity of the detection freq uency than does synchronous detection or other phase extraction algorithm s with conventional window functions . Keywords: H ighly reflective index, p hase measurement, nonlinearity, window function
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