Abstract
The long trace profiler (LTP) is a useful optical metrology instrument for measuring the figure and slope error of cylindrical aspheres commonly used as synchrotron radiation (SR) optics. A multiple-function LTP (LTP-MF) is developed at the optical metrology laboratories of Brookhaven National Laboratory (BNL) with a goal of increasing the accuracy of the measurement and extending the range of applications to other areas. Characteristics of the LTP-MF are a very compact and lightweight optical head, a large angular test range (±16 mrad), and high accuracy. The LTP-MF can be used in various configurations: as a laboratory-based LTP, as an in situ LTP or penta-prism LTP, as an angle monitor, as a portable LTP, and as a small-radius-of-curvature test instrument. The system configuration, designs of the compact optical head and slide, and analysis of different measurements modes and systematic error correction methods are introduced. Preliminary comparison measurements between the LTP-MF and the LTP-II are presented.
Published Version
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