Design of fabrication of ESD protection circuit with high holding voltage for power IC

Abstract

ABSTRACTIn this paper, A newly Silicon Controlled Rectifier (SCR)-based Electric Static Discharge (ESD) protection circuit is proposed. The proposed circuit has the latch-up immunity in normal operating conditions with the high holding voltage by inserting the floating regions. To verify the electrical characteristics, a Technology Computer Aided Design (TCAD) simulation is performed by setting each of variables: D1, D2, D3, and D4. The results of the simulation show that the proposed protection circuit has the holding voltage 5 V higher than the conventional circuits and has the same level of robustness properties as the existing SCR. In addition, the proposed circuit is fabricated through a 0.18 μm Bipolar-CMOS-DMOS process. The electrical characteristics are confirmed by measuring Transmission Line Pulse, and the robustness properties are measured through Human Body Model (HBM) and Machine Model (MM). The holding voltage is about 20 V, which has the increases above 18 V or more compared to the conventional SCR. Therefore, the proposed circuit is proved to have the better ESD protection performance than HBM 8 kV and MM 800 V higher than HBM 2 kV and MM 200 V, the commercial standard.