Abstract
The miniaturized and integration antenna is designed to utilize high dielectric constant silicon substrate. Because of the inverse relation between planar size and dielectric constant, the proposed silicon antenna has very compact planar size. In order to enhance radiation efficiency of silicon antenna, the design method of photonic crystal antenna is proposed by applying periodical triangular lattice. Three dimensional MEMS manufacturing technology is used to fabricate the proposed antennas by photoetching, ICP through-hole etching and bonding processes, which can accurately realize cavity, air through-holes and other subtle and complicated structures. The experiment results demonstrate the MEMS antenna can obviously extend working bandwidth and improve radiation gain of the original antenna based on two dimensional triangle lattice photonic crystal structure.
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