Abstract

In this study, amorphous/nanocrystalline TiAlCrNbZrx (x = 0, 0.3, 0.7, 1) multi-component alloy films have been successfully prepared on the surface of 316L stainless steel using direct current magnetron sputtering technique. The composition, microstructure, corrosion and mechanical properties, especially the effect of Zr content and structure on the properties, are discussed in detail. X-ray diffraction (XRD) and transmission electron microscopy (TEM) data revealed the presence of nanocrystalline phases among the amorphous phase. The results showed that the amorphous phase can effectively mitigate corrosion, while the nanocrystals can improve the mechanical properties and adhesion of the films as the Zr content increased. The lattice distortion caused by the incorporation of large atomic Zr contributed to a significant change in the film structure. TiAlCrNbZr films with the most nanocrystals showed better plastic deformation ability, while TiAlCrNbZr0.3 has a suitable amorphous/nanocrystal ratio, good corrosion resistance, and excellent mechanical properties.

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