Design of a VLS Grating-Lens Hybrid Component for Miniature Spectrometer

Abstract

we propose a micro varied-line-spacing (VLS) grating-lens hybrid component that integrates the collimation, dispersion and focus functions for use in a miniature spectrometer. We adopt the principle of least wave change to design and optimize the VLS grating pattern on the spherical lens surface, and then build a model in ZEMAX to simulate the spectral resolution performance. The best spectral resolution turns out to be 1nm at the center wavelength of the target wavelength range. The resolution across the wavelength range from 450nm to 650nm is better than 4nm.