Abstract
Design of a tunable Fabry–Perot filter based on a silicon wafer for gas sensing applications in the infrared
Published Version
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https://doi.org/10.1016/j.infrared.2024.105689
Copy DOIJournal: Infrared Physics & Technology | Publication Date: Dec 1, 2024 |
Design of a tunable Fabry–Perot filter based on a silicon wafer for gas sensing applications in the infrared
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