Abstract
We numerically assess the light propagation and distribution characteristics ofelectromagnetic fields on nanopores formed in dielectric and metal/dielectric membranesusing a frequency-domain finite element method (3D full-wave electromagnetic fieldsimulation). Results of such studies were used to identify aluminum as an ideal materialfor use in optically thick metal/dielectric membranes. The comparison betweenSiN and Al/SiN membranes (with and without a submicron sized aperture) wasnumerically and experimentally shown to verify the effect of optically thick metallayers on light propagation and fluorescence excitation. The cut-off behavior forAl/SiN membranes with varying pore diameters was investigated in terms of lightpropagation, distribution of electromagnetic fields, and light attenuation characteristics.
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