Design of a New Piezo-Electric Micro-Gripper Based on Flexible Magnifying Mechanism

Abstract

Based on the requirements of that the finger can move in parallel, and the displacement of the finger can be detected, the micro-gripper driven by piezoelectric actuator is designed based on the displacement amplification structure with the flexure hinge. The static analysis, the modal analysis, the harmonic response analysis and the transient response analysis of the micro-gripper are carried out by using the finite element analysis software ANSYS. The results of the finite element analysis show that the finger is fully able to move in parallel, and can detect the displacement of the finger; the maximum displacement of the finger is about 101 μm, the first natural frequency is about 130 Hz; the finger tip displacement under the 1 μm step input is about 20 μm, the fingertip vibration is about ±2 μm.