Design of a linear macro–micro actuation stage considering vibration isolation

Abstract

In microelectronics manufacturing, macro–micro actuation stages are typically applied to obtain a high-precision positioning at a high acceleration. Macro–micro actuation stage comprises a voice coil motor that achieves a high-acceleration motion and a piezoelectric stack actuator which realizes nano-positioning motion. However, high acceleration and nano-positioning are a pair of interacted contradictions. Especially, vibration generated from the high-acceleration motion is the dominating obstacle for enhancement of the nano-positioning implementation. The concentration of the article is a design of a linear macro–micro actuation stage considering vibration isolation. In particular, a floating stator system is proposed to suppress the stage’s vibration and further guarantee a higher precision positioning. Additionally, a flexure hinge mechanism connected to the voice coil motor serially is proposed to achieve a linear motion guide and preload to the piezoelectric stack actuator. The results show that the isolate vibration of the floating stator system is effective in both the time and frequency domain analysis of test. And precision positioning is also further validated experimentally through the flexure hinge mechanism and other components.