Active vibration isolation of macro–micro motion stage disturbances using a floating stator platform

Abstract

Macro–micro motion stage is mainly applied in microelectronics manufacturing to realize a high-acceleration, high-speed and nano-positioning motion. The high acceleration and nano-positioning accuracy would be influenced by the vibration of the motion stage. In the paper, a concept of floating stage is introduced in the macro–micro motion for isolating vibration disturbances. The design model of the floating stage is established and its theoretical analyses including natural frequency, transient and frequency response analyses are investigated, in order to demonstrate the feasibility of the floating stator platform as a vibration isolator for the macro–micro motion stage. Moreover, an optimal design of the floating stator is conducted and then verified by experiments. In order to characterize and quantify the performance of isolation obtained from the traditional fixed stator and the floating stator, the acceleration responses at different accelerations, speeds and displacements are measured in x, y and z directions. The theoretical and experimental analyses in time and frequency domains indicate that the floating stator platform is effective to actively isolate the vibration in the macro–micro motion stage.