Abstract
A new instrument for surface research has been developed which combines an ion microprobe and an electron microprobe. Beams of ions of electrons with energies up to 20 keV are run through the same demagnifying lens systems and brought to a focus of about one micron of less diameter on the sample. Both beams can be used separately or, by virtue of a novel lens design, simultaneously. Primary particles scattered on the surface and secondary particles released from the surface can be analyzed by a combined energy and mass spectrometer with high solid angle acceptance. Scanning is provided for either one of the two primary beams. and scanning micrographs can be obtained either with analyzed particles or with unanalyzed particles. In order to facilitate investigation of surface phenomena, the whole apparatus is laid out in ultra high vacuum technology and can be baked at 250°C.
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