Abstract
Multilayer depth-graded (aperiodic) W/Si and W/B4C mirrors with a period changing over depth have been designed, fabricated, and investigated. The mirrors have almost constant reflectance (from 25 to 35% for different mirrors) at a wavelength of 0.154 nm in a wide range of grazing angles (the reflection bandwidth ranges from 0.25° to 0.4°). It is shown that the main reason for the distortions observed on the plateau of the reflection curve is incorrect consideration of the interlayers formed at the interface of neighboring films during fabrication of the structures. The mirrors with sharp interfaces (for example, WSi2/Si) are preferential for practical purposes.
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