Abstract
This paper presents a new vibration-based electromagnetic micro power generator fabricated using microelectromechanical systems (MEMS) technology, which can convert ambient vibration energy into electric power. The microgenerator consists of a permanent magnet of NdFeB, a copper planar spring and a two-layer copper coil. ANSYS modal analysis was used to predict the resonant frequencies and resonant vibration modes of the spring-mass system. The detailed fabrication processes of the microgenerator are given. Experimental results show that the prototype microgenerator can generate open-circuit voltage of 60mV ac peak–peak with 121.25Hz input frequency and the acceleration of 1.5g (g=9.8m/s2). The experimental and simulated results were compared and discussed.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call