Design, Fabrication, and Integration Technology of Large-Scale Microlens Array for Infrared Charge Coupled Device Application

Abstract

Infrared charge coupled device (IRCCD) integration with microlens array is an effective method for improving the detecting sensitivity of IRCCD sensors. In this paper, we present the diffractive microlens array (MLA), which is manufactured by the submicron photolithography technology and magnetically enhanced reactive ion etching (MERIE) on infrared quartz substrate. The integration procedure between microlens array and PtSi Schottky-barrier IRCCD chip is introduced in detail. The optical response of IRCCD sensor with microlens array is tested and the average response increases 0.23 in the spectral range of 1.2∼5.0 μm. The measuring results show that the large-scale diffractive microlens array is able to improve the detecting sensitivity of IRCCD and that the integration technology mentioned is available.