Design, Fabrication, and Characterization of a High Fill-Factor, Large Scan-Angle, Two-Axis Scanner Array Driven by a Leverage Mechanism

Abstract

We report on the design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array. The two-axis microelectromechanical-systems (MEMS) mirror is driven by electrostatic vertical comb-drive actuators through four motion amplifying levers. The maximum mechanical rotation angles are <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$pm 6.7^circ$</tex> at 75 V for both axes, leading to total optical scan angle of 26.8 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$^circ$</tex> . The resonant frequency is 5.9 kHz before metallization. A linear fill factor of 98% is achieved for the one-dimensional (1-D) micromirror array. This 1D array of two-axis micromirrors was designed for <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1times N ^2$</tex> wavelength-selective switches (WSSs). In addition to two-axis rotation, piston motion with a stroke of 11.7 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$mu m$</tex> is also attained.1731