A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers

Dooyoung Hah Dooyoung Hah,M.C Wu,Hung Nguyen Hung Nguyen,Hsin Chang Hsin Chang,H Toshiyoshi,S Huang

doi:10.1109/ofc.2002.1036226

A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers

Dooyoung Hah Dooyoung Hah, M.C Wu + Show 4 more

https://doi.org/10.1109/ofc.2002.1036226

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Publication Date: Jan 1, 2002

Citations: 23

Affiliation: University of California, Los Angeles, The University of Tokyo, Tokyo University of Science

#Micromirror Array #Low Voltage + Show 8 more

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Abstract

A MEMS micromirror array with hidden vertical comb-drive actuator and springs has been successfully demonstrated. The devices were fabricated using SUMMiT-V process. The fabricated micromirror showed large optical scan angle (24/spl deg/) and low actuation voltage (9 V). The fill-factor of the micromirror array was as high as 91%. Applications of the micromirror array for WDM routers are also discussed.

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