Abstract
Visible light communication offers abundant spectrum resources, which can alleviate the current shortage of wireless communication spectrum resources, and the security of the system is very reliable. In this study, a new photodiode (PD) array with micro-nano optical structure is designed and shown to effectively improve the absorption efficiency of PDs to blue, green, and red light. The absorption efficiency of blue, green, and red light at the central wavelength reached 96.8%, 97.5% and 98.6%, respectively, thus demonstrating the improved quantum efficiency of the device. Moreover, three color PDs are integrated into an ultra-thin silicon-on-insulator structure, increasing the integration and response speed of the device. The ultra-thin structure of the PD increases the response bandwidth up to the GHz level.
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