Design and simulation of touch mode MEMS capacitive pressure sensor

Abstract

This paper presents the design and simulation of a capacitive pressure sensor system for biomedical applications. Employing the Micro Electro Mechanical Systems (MEMS) technology, high sensor sensitivities and resolutions have been achieved. This report provides initial data on the design and simulation of such a sensor. Capacitive sensing uses the diaphragm deformation-induced capacitance change. The sensor composed of a polysilicon diaphragm that deflects due to pressure applied over it. Applied pressure deflects the 2 µm diaphragm changing the capacitance between the Silicon substrate and the polysilicon diaphragm. The simulation of the MEMS capacitive pressure sensor in touch mode achieves good linearity and large operating pressure range. Intellisuite software is used for modeling and simulating of MEMS capacitive pressure sensor to optimize the design, improve the performance and reduce the time of fabricating process of the device.