Abstract
Micromechanical inertia sensors - accelerometers, gyroscopes, multisensor modules and systems based on them - are widely used in navigation, for compensation of other instruments (accelerometers, inclinometers) or stabilization (gyroscopes). The paper presents the designed construction of a MEMS angular rate sensor with two sensitivity axes, topology of gyroscope is presented; modal and static analysis is performed using ANSYS CAD; simulation results of micromechanical gyroscope operation under the action of angular velocities using VHDL-AMS are presented.
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