Abstract

We have developed an inertial sensor, which is a functionally integrated microelectromechanical system that includes a two-mass two-axis gyroscope-accelerometer. The device is a highly sensitive multisensor that allows solving problems of object orientation in space and control of its movement parameters. The article presents the design and topology of the sensor element. The results of modeling obtained using CAD ANSYS are presented. The scope of this inertial sensor is diagnostic systems for the needs of railway transport.

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