Abstract
The design of a micro hotplate is very important since it is a key component of micro-sensors, particularly gas sensors. A WO3 gas sensor requires a maximum temperature of 300 °C for ozone detection. This paper discussed the design and simulation of a novel platinum micro heater model, the meander-spiral combination form, at a temperature of 300 °C with low power consumption and high temperature uniformity, and compared its simulation results with two other heater geometries—meander and spiral. The novel geometry offers a compromise between homogeneity, consumption, and thermal response.
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