Abstract
Accelerometer is an electromechanical device, which is used for physical measurement along the orthogonal coordinates. Micro Electro Mechanical Systems (MEMS) based capacitive accelerometers are embedded in many modern technological applications. This paper presents the comparison between two single axis MEMS based capacitive accelerometers, which have the natural frequencies of 7 and 2.2 kHz. This work includes design, simulation, analytical modelling, and finite element modelling of each MEMS comb type capacitive accelerometer with different operating frequencies. The accelerometer was designed using COMSOL Multiphysics and MATLAB simulator tool.
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