Abstract
A broadband unidirectional coplanar waveguide (CPW) fed rectangular slot millimeter wave antenna based on micro-electro-mechanical systems (MEMS) non-silicon micro-fabrication technology is discussed. A wide impedance bandwidth of 75% (Su<-10dB) was obtained. By adding special wave guiding structure and reflecting structure, the antenna achieves unidirectional radiation, and the max gain of the antenna increases from 3. 8 dB to 6. 8 dB. Ansoft HFSS and CST Microwave Studio, two high frequency structure simulation softwares are used to simulate and analyze the antenna performances.
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