Abstract
Automated force measurement is one of the most important technologies in realizing intelligent automation systems. However, while many methods are available for micro-force sensing, measuring large three-dimensional (3D) forces and loads remains a significant challenge. Accordingly, the present study proposes a novel 3D force sensor based on a parallel mechanism. The transformation function and sensitivity index of the proposed sensor are analytically derived. The simulation results show that the sensor has a larger effective measuring capability than traditional force sensors. Moreover, the sensor has a greater measurement sensitivity for horizontal forces than for vertical forces over most of the measurable force region. In other words, compared to traditional force sensors, the proposed sensor is more sensitive to shear forces than normal forces.
Highlights
Automated force measurement is a critical requirement for intelligent automation systems.Many one-dimensional (1D) force sensors based on micro-electromechanical systems (MEMS)techniques have been developed in recent years, including strain gauge-based force sensors, piezoresistive force sensors, capacitive force sensors, piezomagnetic force sensors, optical force sensors, and electroactive force sensors [1]
Sieber et al [5] proposed a triaxial force sensing device consisting of a MEMS sensor attached to a three degree-of-freedom (3DOF) nanomanipulator
The formulations presented in the previous section for the transfer function and sensitivity of the proposed 3D force sensor were implemented in a MATLAB (MathWorks, Inc., Natick, MA, USA) program
Summary
Automated force measurement is a critical requirement for intelligent automation systems.Many one-dimensional (1D) force sensors based on micro-electromechanical systems (MEMS)techniques have been developed in recent years, including strain gauge-based force sensors, piezoresistive force sensors, capacitive force sensors, piezomagnetic force sensors, optical force sensors, and electroactive force sensors [1]. Automated force measurement is a critical requirement for intelligent automation systems. Many one-dimensional (1D) force sensors based on micro-electromechanical systems (MEMS). Various researchers have demonstrated multi-dimensional force/torque sensors using multi-component structures [2,3]. Presented a three-dimensional (3D) sensor for detecting normal and shear forces incorporating a rectangular rod and an etched membrane. Sieber et al [5] proposed a triaxial force sensing device consisting of a MEMS sensor attached to a three degree-of-freedom (3DOF) nanomanipulator. Cappelleri et al [6] developed a vision-based sensor for micro-robotic systems consisting of a CCD camera and an elastic mechanism with a known force-deflection response. Kim [7] constructed a 3D force sensor for intelligent grippers based on five parallel plate-beams
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