Abstract
A novel piezoelectric jetting dispenser is proposed for microelectronic packaging in this article. It adopts a piezoelectric drive, a lever displacement amplifier, and a recovery system with double springs in a staggered position. The automatic dynamic analysis of mechanical systems (ADAMSs) simulation model of the dispenser is established and first applied to the study of the high-frequency response performance. The displacement curve and the velocity curve of the impactor are obtained at the frequency of 200 and 500 Hz. The test results prove that the ADAMS model is feasible. Based on dispensing experiments, the volume and the volume error of a drop at different dispensing frequencies are studied. The volume of a drop is 8.5 nL at the frequency of 800 Hz. The maximum relative error of the droplet volume is less than ±7.2% at the frequency of 200, 300, and 400 Hz.
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