Design and realization of sculpture-shaped ciliary MEMS vector hydrophone

Abstract

The traditional design of cilium MEMS vector hydrophone (CVH) usually adds attachment to the cilium to increase the force-bearing area of the cilium, which improves the sensitivity of CVH but also greatly reduces the inherent frequency of hydrophone, and brings heavier burden to the cross-beam. Based on the radiation noise of ships that is generally below 1 kHz, this article designs a sculpture-shape cilium MEMS vector hydrophone (SCVH). Compared to traditional CVH, it enhances the sensitivity of hydrophone, increases the resolution of weak signal, and reaches the working frequency band of 1 kHz. In this paper, the stress analysis of cantilever beam is carried out, and then the appropriate size of SCVH is determined by simulation analysis. Finally, the sensitivity and directivity experiments in standing wave tube are carried out. The experimental results show that the sensitivity of SCVH at 1 kHz reaches -184.2 dB (0 dB = 1 V/μPa), 13.1 dB higher than traditional CVH. The working frequency band of SCVH is 20 Hz-1kHZ, and the depth of “8”-shaped directivity concave point is larger than 30 dB.