Abstract
To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical and simulation analyses have been carried out. Lastly, a prototype of the differential MEMS vector hydrophone has been created and tested using a standing wave tube and a vibration platform. The results of the test show that this hydrophone has a high sensitivity, Mv = −185 dB (@ 500 Hz, 0 dB reference 1 V/μPa), which is almost the same as the previous MEMS vector hydrophones, and has a low acceleration sensitivity, Mv = −58 dB (0 dB reference 1 V/g), which has decreased by 17 dB compared with the previous MEMS vector hydrophone. The differential MEMS vector hydrophone basically meets the requirements of acoustic vector detection when it is rigidly fixed to a working platform, which lays the foundation for engineering applications of MEMS vector hydrophones.
Highlights
The MEMS bionic vector hydrophone developed by North University of China is combined with the piezoresistive principle, MEMS technology, the bionics principle, and the underwater acoustic principle, and has the advantages of small size, vector character, and good consistency [1].Depending on its unique working mechanism and broad development prospects, the MEMS vector hydrophone has attracted significant attention of many researchers
The acceleration sensitivity of the MEMS vector hydrophone is a significant obstacle to its engineering application
Above represent that thiswithout differential vector hydrophone has suspension, low sensitivity to acceleration can design the working platform directly relying on an elastic which meetsand theit basic be rigidly on the working platform directly without relying on an elastic suspension, which requirements with mounted low acceleration sensitivity
Summary
The MEMS bionic vector hydrophone developed by North University of China is combined with the piezoresistive principle, MEMS technology, the bionics principle, and the underwater acoustic principle, and has the advantages of small size, vector character, and good consistency [1]. According model to the operational principle of hydrophone the differential developed amplifier, this the of China hydrophone that could simultaneously receive acoustic signals is shown differential-type, MEMS whichvector primarily contains a chip and sound-transparent cap.and. R1–R8 are distributed on the four-beam structure by diffusion technology, transparent material is of nitrile rubber and the package is filled with silicone oil.aThe chip of the MEMS vector hydrophone consists a four-beam silicon micro-structure and micro-cylinder fixed to the bionic vector hydrophone consistsThe of a distribution four-beam silicon micro-structure and a micro-cylinder fixedare shown connecting two Wheatstone. This sensor consists of a differential encapsulation of and a symmetrical MEMSFigure sensitive unit.
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