Design and PID Control of Piezoelectric Micro-motion Stage

Abstract

At present, the size of piezoelectric micro-motion stage is relatively large, which is difficult to be applied to the MEMS. For this reason, a piezoelectric micro-motion stage based on lever amplification mechanism is proposed in this paper, and the external dimension is only $\pmb{ 57}\mathbf{mm}\times \pmb{57}\mathbf{mm}\times$ 5mm. The stiffness coefficient of displacement amplification mechanism of the piezoelectric micro-motion stage is derived by using energy method. By comparing the theoretical calculation with the experimental data, the damping ratio of the displacement amplification mechanism is estimated. Further, the total transfer function of the piezoelectric micro-motion stage is determined. An experimental test system based on PID closed-loop control is established, we get the open loop hysteresis curve. The experimental results show that the maximum displacement output in the X direction of the piezoelectric micro-motion stage is $\pmb{171\mu}\mathbf{m}$ , and the maximum displacement output in the Y direction is $\pmb{131\mu}\mathbf{m}$ . The minimum resolution in the X direction is $\pmb{2.5\mu}\mathbf{m}$ ; the minimum resolution in the Y direction is $\pmb{3\mu}\mathbf{m}$ . The reposition accuracy in the X direction is $\pm \pmb{1.755\mu}\mathbf{m}$ ; the reposition accuracy in the Y direction is $\pm \pmb{1.752\mu}\mathbf{m}$ .