Design and development of a piezoelectric XY micro-displacement scanning stage

Abstract

This paper presents the design, analysis, and testing of a piezoelectric XY micro-displacement scanning stage (MDSS). The stage is composed of piezoelectric actuation mechanisms (PAMs), compliant restraint mechanism, and moving frame. Due to the limited displacement of stack-type piezoelectric actuator, diamond shaped amplification mechanism (DSAM) is applied in PAM to increase displacement. Since the coupling problem in two-dimensional motion, elliptical compliant restraint mechanism (ECRM) is applied to constrain in-plane parasitic rotation and coupling error between the two motion axes of moving frame. Finite element models of DSAM and XY MDSS with ECRM are established and structural analysis is carried out in Patran/Nastran software. Analysis results show that: 1) the displacement amplification ratio of DSAM is 2.08; 2) the in-plane parasitic rotation and the coupling error between the two motion axes of XY MDSS with ECRM are less than 28.6μrad, 0.87%; 3) the first resonant frequency of XY MDSS is 586.90Hz. Moreover, a prototype of XY MDSS is manufactured, a testing system is established, and a preliminary test is carried out. Testing results show that the displacements of piezoelectric actuators are 23.17μm, 18.82μm. It follows that the displacements after magnification by DSAM are 48.19μm, 39.15μm.