Abstract
Currently employed quadrupole-based SIMS instrumentation is reviewed critically. The various problems of relevance are discussed in great detail. The importance of phase space dynamics is outlined with particular reference to the acceptance characteristics of quadrupole mass filters. The performance of most instruments used to measure secondary ion energy spectra is found to be much less under control than anticipated. By contrast, quadrupole-based in-depth analysers and ion micro-probes appear to operate quite well. It is shown that in order to optimize the lay-out of SIMS instruments employed for trace analysis and depth profiling, a detailed knowledge of bombardment-induced effects is mandatory.
Published Version
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