Design and Optimization of Surface Properties for Diamond-Like Carbon Films by Sputtering Depositions

Abstract

Analysis of mechanical properties of diamond-like carbon (DLC) films based on experimental designs was reported to optimize characterize by a magnetron sputtering. An orthogonal array experiment was introduced and the effects of deposited parameters on the films were systematically explored. The films were analyzed by scanning electron microscopy (SEM). Friction and wear tests were carried out using a pin-on-disk tribometer. In this study, the two stages such as adhesive and abrasive wears for tribological properties are clearly visible among L18 tests, where at the higher wear volume losses exist an abrasive wear while the less wear volume losses appear an adhesive wear. A slightly worn surface with a glassy carbon phase appeared and a lower wear volume loss became visible in the DLC films. Through the optimal design, the experimental results demonstrate the tribological properties on DLC multilayer films are increased by a magnetron sputtering, thereby justifying the reliability and feasibility of the approach.