Design and Optimization of Piezoresistive Materials Based Microbridge for Electro-osmosis Pressure Sensor

Abstract

Diabetes is a metabolic disorder which is due to high sugar levels. Symptoms of diabetes are frequent urination, increased hungry and increased thirst. Here we are using electro-osmotic pressure sensor to measure the change in glucose concentration levels. Silicon dioxide, aluminium nitride and silicon nitride are suitable for microbridge membrane, among them SiO2 is considered as membrane material due to minimum young’s modulus. Silicon, liquid crystal polymer and glass (quartz) are used for substrate materials, owing to its high cost LCP and glass (quartz) is not much preferable for substrate materials. By using FEM tool, the mechanical behavior of microbridge and electrical response of the Piezo resistors are analyzed based on the non-linearity and sensitivity.