Abstract
The differential stress distribution of rectangular diaphragm with different sizes is simulated and analyzed using ANSYS. The results show that the maximal differential stress region on the rectangular diaphragm is located at the diaphragm center and the long side center, and also it gradually increases as the length-width ratio decrease. When the ratio is less than 1:2.2, the increase degree is not obvious and even falls slightly. According to this, the length-width ratio of the rectangular strain diaphragm was optimized as 1:2.2. Furthermore, the influence of stain diaphragm with different thicknesses and temperatures in differential stress distribution is discussed. It proves that the differential stress of the diaphragm is less affected by temperature, when the diaphragm thickness is properly chosen. The present results will provide the prerequisite for the design of miniature high-temperature pressure sensor in the future.
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