Abstract

Surface acoustic wave gyroscopes (SAWGs), as a kind of all-solid-state micro-electro-mechanical system (MEMS) gyroscopes, can work normally under extremely high-impact environmental conditions. Among the current SAWGs, amplitude-modulated gyroscopes (AMGs) are all based on the same gyro effect, which was proved weak, and their sensitivity and intensity of the output are both lower than frequency-modulated gyroscopes (FMGs). However, because FMGs need to process a series of frequency signals, their signal processing and circuits are far less straightforward and simple than AMGs. In order to own both high-sensitivity and simple signal processing, a novel surface acoustic traveling wave gyroscope based on amplitude modulation is proposed, using one-dimensional phononic crystals (PCs) in this paper. In view of its specific structure, the proposed gyroscope consists of a surface acoustic wave oscillator and a surface acoustic wave delay line within a one-dimensional phononic crystal with a high-Q defect mode. In this paper, the working principle is analyzed theoretically through the partial wave method (PWM), and the gyroscopes with different numbers of PCs are also designed and studied by using the finite element method (FEM) and multiphysics simulation. The research results demonstrate that under a 1 V oscillator voltage output, the higher sensitivity of −23.1 mV·(rad/s)−1 in the linear range from −8 rad/s to 8 rad/s is reached when the gyro with three PC walls, and the wider linear range from −15 rad/s to 17.5 rad/s with the sensitivity of −6.7 mV·(rad/s)−1 with only one PC wall. Compared with the existing AMGs using metal dots to enhance the gyro effect, the sensitivity of the proposed gyro is increased by 15 to 112 times, and the linear range is increased by 4.6 to 186 times, even without the enhancement of the metal dots.

Highlights

  • In order to retain the advantages of simple signal acquisition and the processing of amplitude-modulated gyroscopes (AMGs) while combining the advantages of the high sensitivity of frequency-modulated gyroscopes (FMGs), this paper proposes an amplitude-modulated surface acoustic traveling wave gyroscope based on one-dimensional phononic crystals (PCs)

  • When the defect mode introduced by the defect layer fell within the band gap of the PCs, the SAW, whose frequency was within the band gap but did not match the defect mode, would not be coupled into the PCs, and so could spread to the receiving interdigital transducers (IDTs) unaffected; the SAW

  • An amplitude-modulated surface acoustic traveling wave gyroscope based on one-dimensional PCs was proposed, and the principle, structure and performance of the gyroscope were researched and analyzed by using the finite element method (FEM) and partial wave method (PWM)

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Summary

Introduction

Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. One of the most important characteristics of PCs is the defect mode, and a high-Q defect mode can be obtained by rationally selecting materials and designing a structure [17,19,20,21,22] This high-Q defect mode is extremely sensitive to the frequency of the excitation signal, and can be utilized in sensors to obtain an exceedingly high sensitivity and resolution, thereby providing an inspiration for novel SAWGs. In order to retain the advantages of simple signal acquisition and the processing of AMGs while combining the advantages of the high sensitivity of FMGs, this paper proposes an amplitude-modulated surface acoustic traveling wave gyroscope based on one-dimensional PCs. the proposed AMGs detect the first surface acoustic traveling wave, which has a higher amplitude, instead of the secondary SAW.

Design of Basic Structure and Working Principle
Theoretical Analysis
Optimization and Analysis of PCs
Optimization and Analysis of IDTs
Comprehensive Analysis
Conclusions

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