Abstract
This paper reports on the optimization of a novel micro-hotplate with three pins designed for micro-structural gas sensor. The temperature distribution of the Si-substrated micro gas sensor was simulated and analyzed by the finite element analysis (FEA) tool ANSYS. In order to make the gas sensor obtain perfect properties of good temperature uniformity, the thickness of Si substrate, thickness of the front and rear SiO2, measuring electrode width and electrode space were designed to be 150, 50,100, 20 and 500 μm, respectively. The new micro-structural gas sensor is benefit for the improvement of sensor performance.
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