Abstract
This paper describes the design process of the MEMS-based pressure sensor and analysis of circuit characteristics and parameters such as mechanical and electrical variation. Using the industry standard electrical and mechanical tools for design and analysis, in short duration low cost mechatronics equipment with improved accuracy and performance can be achieved. In this paper, piezoresistive material characteristics and theoretical signal conditioning analyses are also investigated for improving its performance. A newly proposed design technology for MEMS-based pressure sensors make a small circuit containing the electromagnetic component, transformer and analyzed for the said purpose.
Published Version
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