Design and modeling of inversion layer ultrasonic transducers using LiNbO 3 single crystal

Abstract

Using inversion domain engineering controlled by heating temperature, the LiNbO 3 (LNO) piezoelectric plate with both odd and even-order thickness-extensional modes can be excited simultaneously. Therefore, the inversion layer ultrasound transducer is expected to be capable of operating over a wider frequency range. In this paper, the electrical impedance and the acoustic characteristics of LiNbO 3 (LNO) inversion layer transducer have been studied by finite element modeling (FEM). The transducer designed for this study uses a 36° rotated Y-cut LiNbO 3 thin plate with an active element thickness of approximately 100 μm. First the electrical and elastic properties of the 36° rotated Y-cut LNO were obtained by transforming a basic piezoelectric matrix for Z-cut LNO. In order to validate the FEM using the transformed properties several pieces of pure and 50% inversion layer LNO were tested on the electrical impedance analyzer. The modeled impedance characteristics were consistent with the measured data. Next the model was used to design 50–60 MHz transducers using pure and 30% inversion LNO. Two λ/4 matching layers and a Tungsten loaded epoxy backing were used in these designs. The modeled results show that an over 90% bandwidth transducer can be made with proper matching and 30% inversion layer.