Abstract
A simulation model for the analysis of MEMS capacitor has been developed using mechanical equivalencies. The capacitor structure used in this paper has four parallel plates to improve the tuning range. Two of the plates are suspended and the other two plates are fixed. The developed mechanical model is validated with the help of structure simulations performed using PolyMumps process. The simulation results show good correlation between the equivalent mechanical model and the structural model. The tuning range of the mechanical model developed is 2.465:1 where as the PolyMumps fabricated capacitor produces a tuning range of 2.4555:1.The mechanical resonant frequencies of the top and bottom suspended plates are simulated as 501 rad/sec and 706 rad/sec respectively.
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