Abstract
This paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is designed. The dynamics and mechanical sensitivity of the design are theoretically analyzed. The improvement rate of mechanical sensitivity (IRMS) is introduced to represent the optimization effect of the new structure compared with the conventional one. The analytical solutions illustrate that the IRMS monotonically increases with increased stiffness ratio of the power arm (SRPA) but decreases with increased stiffness ratio of the resistance arm (SRRA). Therefore, three types of gyro structures with different stiffness ratios are designed. The mechanical sensitivities increased by 79.10%, 81.33% and 68.06% by theoretical calculation. Additionally, FEM simulation demonstrates that the mechanical sensitivity of the design is in accord with theoretical results. The linearity of design is analyzed, too. Consequently, the proposed new anchored leverage mechanism TFG offers a higher displacement output of sense mode to improve the mechanical sensitivity.
Highlights
A micro-electro-mechanical system (MEMS) gyroscope is a kind of inertial sensor used to detect the attitude angle and angular rate
It is found that the simulation values of the improvement rate of mechanical sensitivity (IRMS) are in accord with the theoretical values, error still exists in these results, which verifies the analysis result of the IRMS in that we proposed that it would increase with increasing α but decrease with increasing β
stiffness ratio (SR) cannot or decrease the theoretical of a tuning fork with gyroscope withincrease anchored leverage mechanism, it is concluded that the IRMS monotonically increases with increasing αα but decreases indefinitely
Summary
A micro-electro-mechanical system (MEMS) gyroscope is a kind of inertial sensor used to detect the attitude angle and angular rate. It is based on an energy conversion of two vibrational modes due to the Coriolis effect [1,2]. A common type of MEMS vibratory gyroscope is implemented as a tuning fork gyroscope (TFG) It is composed of two identical tines and two coupling mechanisms for synchronization of the anti-phase drive mode and anti-phase sense mode. The displacement of differential tines is maximized and the mechanical sensitivity can be effectively increased when the two work modes of the gyroscope have the same resonant frequency (i.e., they are mode matched) [12,13].
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
