Abstract
In this paper, a new micromachined tuning fork gyroscope (TFG) with an anchored diamond coupling mechanism is proposed while the mode ordering and the vibration sensitivity are also investigated. The sense-mode of the proposed TFG was optimized through use of an anchored diamond coupling spring, which enables the in-phase mode frequency to be 108.3% higher than the anti-phase one. The frequencies of the in- and anti-phase modes in the sense direction are 9799.6 Hz and 4705.3 Hz, respectively. The analytical solutions illustrate that the stiffness difference ratio of the in- and anti-phase modes is inversely proportional to the output induced by the vibration from the sense direction. Additionally, FEM simulations demonstrate that the stiffness difference ratio of the anchored diamond coupling TFG is 16.08 times larger than the direct coupling one while the vibration output is reduced by 94.1%. Consequently, the proposed new anchored diamond coupling TFG can structurally increase the stiffness difference ratio to improve the mode ordering and considerably reduce the vibration sensitivity without sacrificing the scale factor.
Highlights
The operational principle of MEMS vibrating gyroscopes relies on the Coriolis effect with an energy transfer between two vibration modes [1]
The coupling stiffness in the in-phase is zero in the direct coupling one and the anchored coupling one is larger, which causes that the in-phase mode frequency is much higher than the anti-phase and that the stiffness difference ratio is larger than the direct coupling one
The coordinate transformation method is used to compute the dynamic response caused by the common-mode vibration, which coincides with the FEM simulations
Summary
The operational principle of MEMS vibrating gyroscopes relies on the Coriolis effect with an energy transfer between two vibration modes [1]. To decrease the vibration output caused by fabrication defects, a large frequency separation between the in- and anti-phase modes is needed [11,12,13] These methods reduce the scale factor of TFGs. To resist the linear vibration without sacrificing the sensitivity and eliminate the lower frequency mode, an improved mode ordering by using different coupling mechanisms between two tines is necessary [14,15,16]. An analytical analysis on the response of the analyze the mode ordering and the vibration sensitivity
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