Design and manufacture of a microchannel plasma reactor by CNC milling

Abstract

Microcavity plasma devices show promise for controlled plasma chemistry. However, these devices are typically made through processes that are difficult to scale up. We present the design and characterization of a microchannel system suitable for the study of microplasmas. The channel was created with a micro-mill CNC machine that allows for quick device manufacturing. The channel is characterized using scanning electron microscopy and profilometry. Finally, we use recently published models of flow in a microchannel with bends to elucidate pressure conditions throughout the channel. Future work will encompass characterization of plasma conditions.