Abstract
In order to alleviate the problem of low back pressure of valveless piezoelectric pumps, a novel piezoelectric screw pump was proposed, manufactured and tested. It used the movable cavity formed by screw thread fit to realize liquid transportation. The theoretical model was used to analyze the factors affecting the performance of the piezoelectric screw pump. The geometrical parameters of the piezoelectric vibrator were optimized by the finite element method, and a prototype was made for testing. The test verifies the results calculated by the above analysis. The results showed that under the driving frequency of 13.8 kHz, the maximum back pressure was 6.70 kPa and the maximum flow was 750 μl min−1. Moreover, this novel piezoelectric screw pump is simple in structure, and can maintain the state of liquid circuit by self- locking when power is off, and has higher reliability.
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