10.1063/5.0055795.1

Abstract

Valveless piezoelectric pumps usually have less flow than valve piezoelectric pumps, but the valve piezoelectric pumps have some limitations, such as high cost, complex structure, and difficult installation. In order to solve the problem of the low flow rate of the valveless piezoelectric pump, a valveless piezoelectric pump with multi-stage fluid guiding bodies is proposed. Based on the structure and working principle of the piezoelectric pump, the forward energy loss equation is established, and analysis on parameters affecting the energy loss of the pump is then conducted. COMSOL Multiphysics is adopted to construct a two-dimensional model of velocity and von Mises stress distribution. The valveless piezoelectric pumps were then fabricated based on 3D printing technologies, and the prototypes were tested. The results show that the output performance of the pump is the best when the working voltage is 220 V, the frequency is 95 Hz, the length of the oblique arm of the fluid guiding body is 3.5 mm, the spacing is 9.05 mm, and the thickness is 0.1 mm. The maximum flow rate is 520.6 ml/min. In addition, the experimental results prove that the asymmetric fluid guiding body placed in the center of the pump chamber can improve the performance of piezoelectric pumps. This study extends the application of piezoelectric valveless pumps in micromechanical cooling.