Abstract
Abstract. A mid-frequency magnetron sputtering (MFMS) power supply based on TL494 and MCU was introduced. A Buck Chopper and full bridge inverter were applied to the main circuit. The PWM controller TL494 was used in the Buck voltage-regulation control circuit to realize closed loop control. The drive signal of the IGBT in full bridge inverter was based on precise digital pulse width modulator (DPWM) signal produced by the MCU M30290. The DPWM can be set by potentiometer so the power supply can output the square wave with adjustable frequency and duty cycle. The power supply was operated in constant current mode. For micro or strong arcing of the target, different safeguards were adopted by the control circuit. At last, the system test and experimental results show that the stability, reliability and tuning range of the MFMS power supply can meet the requirements of the magnetron sputtering coating.
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