Abstract
This paper presents the design and implementation of a dual-mass MEMS gyroscope with high shock resistance by improving the in-phase frequency of the gyroscope and by using a two-stage elastic stopper mechanism and proposes a Simulink shock model of the gyroscope equipped with the two-stage stopper mechanism, which is a very efficient method to evaluate the shock resistance of the gyroscope. The structural design takes into account both the mechanical sensitivity and the shock resistance. The design of the primary structure and the analysis of the stopper mechanism are first introduced. Based on the expression of the restoring force of the stopper beam, the analytical shock response model of the gyroscope is obtained. By this model, the shock response of the gyroscope is theoretically analyzed, and the appropriate structural parameters are obtained. Then, the correctness of the model is verified by finite element (FE) analysis, where the contact collision analysis is introduced in detail. The simulation results show that the application of the two-stage elastic stopper mechanism can effectively improve the shock resistance by more than 1900 g and 1500 g in the x- and y-directions, respectively. Finally, experimental verifications are carried out by using a machete hammer on the micro-gyroscope prototype fabricated by the deep dry silicon on glass (DDSOG) technology. The results show that the shock resistance of the prototype along the x-, y- and z-axes all exceed 10,000 g. Moreover, the output of the gyroscope can return to normal in about 2 s.
Highlights
With the development of micro-electro-mechanical systems (MEMS) technology, the performances of MEMS devices become greatly improved, and these devices are widely used in various fields.As one kind of silicon-based micro-device, micro-gyroscopes have the great advantages of small size, low power consumption, low cost and batch fabrication compared with their conventional counterparts
We propose a dual-mass MEMS gyroscope with high shock resistance by improving the in-phase frequency of the gyroscope and using the two-stage elastic stopper mechanism
The micro-gyroscope is an important part of MEMS inertial sensors
Summary
With the development of micro-electro-mechanical systems (MEMS) technology, the performances of MEMS devices become greatly improved, and these devices are widely used in various fields. Enhancing the robustness of the weak structures and using stoppers are two kinds of widely-used methods in MEMS devices to improve the anti-shock performance. For a dual-mass micro-gyroscope, a useful method is to raise the in-phase mode frequency, which can further improve its anti-shock performance [14,17]. We propose a dual-mass MEMS gyroscope with high shock resistance by improving the in-phase frequency of the gyroscope and using the two-stage elastic stopper mechanism. The rest of this paper is organized as follows: Section 2 gives the structural design of the dual-mass MEMS vibratory gyroscope, which includes the primary structure and the two-stage elastic stopper mechanism.
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